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Surface chemistry stabilized photolithography for high-resolution quantum dot electronic and optoelectronic devices
교수님성함
Soong Ju Oh
저널명
Materials Today
년도
2025.08



Integrating colloidal quantum dots (QDs) and nanocrystals (NCs) into electronic devices remains challenging because of the harsh photolithography chemical conditions. A functional photoresist (F-PR) incorporating photoactive chemicals, stabilizers, and ligands was developed to enable high-resolution patterning of QD/NC films. This approach enables high-resolution photolithography of QDs/NCs while maintaining their morphological and optoelectronic properties, as the stabilizers in the F-PR suppress ligand detachment and surface degradation during processing. Based on the F-PR patterning, QD patterns with a 4,200 pixels per inch resolution were obtained. The devices fabricated in this study included n-type thin-film transistors with electron mobilities exceeding 1.1 cm2 V−1 s−1, photodetectors with responsivities of 3.98 A W−1, and wearable sensors exhibiting gauge factors of 23.9 ± 4.1 and thermal coefficients of resistance exceeding 1.0 × 10−3 K−1. A light-emitting diode with a luminance and external quantum efficiency of 198,576cd m−2 and 21.58 %, respectively, highlight the versatility of F-PRs for next-generation optoelectronic applications.